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Introduction:
Most Vacuum environment with the oil diffusion pump is mixed with residual gas, over 80% of which is the vapor of water and oil. Common pumps cost more time and is less capable of removing the residual gas, influencing the output and quality of the desired products. In this case, water vapor cryopump is the best choice.
Let’s take a close look at how the water vapor cryopump works. First, a refrigerating pipe, which can reach a temperature lower than -120°C, is put in the vacuum cavity or the pumping hole of oil diffusion pump. By its freezing effect, the pipe absorbs the residual gas rapidly and shortens the time of vacuum pumping by 75%. The vacuum degree is improved by half an order of magnitude, reaching 10-8Torr and 10-5Pa. Therefore, the water vapor cryopump is widely used in the fields of vacuum film plating, aerospace industry, health and medical care, etc.
The TH-135°C Water Vapor Cryopump adopts a double-compressor system as well as the overlapping and auto-overlapping cooling down technique. It is equipped with world-famous compressors and freezing accessories. It has the advantages of rapid refrigeration, high efficiency, low cooling temperature, convenient maintenance and so on.
Main Features:
1. Replacing liquid nitrogen, reducing the cost.
2. With double-compressor refrigeration system, reaching the temperature of -120°C (-
150°C the lowest) within 5 minutes.
3. Adsorbing the water and oil vapor rapidly, shortening the time of air-elimination by
60%~90%
4. Preventing the diffuse of oil from polluting the vacuum cavity
5. Defrosting with hot water, raising and then lowering the temperature swiftly
6. Convenient to install, easy to operate, leaving no exhaust gas
Equipment Accessories:
Dual Pass Feedthrough: The dual pass feed through requires a hole in the vacuum chamber to connect the cryocoil. Custom feedthroughs are available
Cryocoil: The cryocoil will be designed to fit the specific vacuum chamber, based on the information you supply, or you may choose to design and build your own cryocoil.
Technical Parameters:
|
Model |
MR-DF-WVC -145-3P |
MR-DF-WVC -145-5P |
MR-DF-WVC -145-7P |
MR-DF-WVC -145-10P |
MR-DF-WVC -145-12P |
MR-DF-WVC -145-15P |
|
|
Compressor Power (KW) |
2.8 |
4.6 |
6.3 |
8.5 |
10.1 |
12.3 |
|
|
Working Temperature |
-120°C to -150°C |
||||||
|
Gas Pump Speed（l/s） |
30600 |
51000 |
73,000 |
101,000 |
153,000 |
250,000 |
|
|
Cooling Power（W） |
300 |
500 |
1200 |
1800 |
2500 |
3500 |
|
|
Cooling Area (m2) |
0.15 |
0.3 |
0.5 |
0.7 |
1.2 |
2. 0 |
|
|
Cooling Length |
8m,φ6mm |
10m,φ10mm |
12m,φ12mm |
14m,φ16mm |
24m,φ16mm |
40m,φ16mm |
|
|
Pre-cooling Time（min） |
≤30 |
≤30 |
≤30 |
≤30 |
≤40 |
≤40 |
|
|
Cooling Time（min） |
≤3 |
≤3 |
≤3 |
≤3 |
≤4 |
≤5 |
|
|
Defrost Time (min)
|
≤3 |
≤3 |
≤3 |
≤3 |
≤3 |
≤3 |
|
|
Re-cooling Time (min) |
≤5 |
≤5 |
≤5 |
≤5 |
≤6 |
≤6 |
|
|
Oil Pump Legth（mm） |
≤300 |
≤500 |
≤800 |
≤1000 |
Dual Channel |
Dual Channel |
|
|
Cooling Type |
Air & Water (t≤30°C) |
Water (t≤30°C) |
Water (t≤30°C) |
Water (t≤30°C) |
Water (t≤30°C) |
||
Technical Parameters:
|
Model |
Temperature Range |
Chamber Size (L) |
Type |
|
MR-DF-WVC -145-5P |
-145°C |
0.3m3 |
Used for Diffusion Pump or Collection Pump |
|
MR-DF-WVC -145-7P |
-145°C |
0.5m3 |
Used for Diffusion Pump or Collection Pump |
|
MR-DF-WVC -145-10P |
-145°C |
0.7m3 |
Used for Collection Pump |
|
MR-DF-WVC -145-12P |
-145°C |
0.9m3 |
Used for Collection Pump & Cold Trap |
|
MR-DF-WVC -145-15P |
-145°C |
1.5m3 |
Used for 2 Channels of Collection Pump |
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